Installation and Maintenance Method of the FFU Fan Filter Unit

2023-12-14

For the FFU fan filter unit, this paper mainly discusses the fan filter unit from six aspects: the definition of the fan filter unit, the working principle, the applicable industry, the applicable environment, the installation and use environment and the precautions for installation and use.

1. Definition of the fan filter unit:
FFU fan filter, also known as fan filter unit is a modular terminal air supply device with its own power and filtering effect.

2. Operating principle of the fan filter unit:
The fan inhales the air from the top of the FFU fan filter and filters it through HEPA, and the filtered clean air is evenly sent out at a wind speed of 0.45m/s±20% on the entire air outlet surface.

3. Applicable industry for fan filter units:
Widely used in semiconductor, liquid crystal manufacturing, electronics, biopharmaceutical,medical food and other industries.

4. Applicable environment of the fan filter unit:
•Surrounding temperature: 5℃ ~40℃
•Humidity: less than 85%RH (with no moisture condensation state)
•Surrounding air: general indoor air
•Clearance: level 100-10
•Avoid repeated ON / OFF operations
If the fan filter screen unit is used in the environment not meeting the above conditions, the performance of the products will be affected, and the electrical short circuit phenomenon may occur, causing damage to the electrical parts and shortening the service life of the products.

5. FFU fan filter unit installation and use environment:
•The FFU fan filter unit shall be installed away from the heater, furnace or other heat source.
•The place where the FFU fan filter unit is installed should not be placed in flammable materials to avoid fire.
•Do not use explosive or volatile chemicals near the machine, If the machine inhales these chemicals, it may cause accidents such as fire or explosion.
•Do not use sulfuric acid, hydrochloric acid, bleach and other corrosive chemicals near the machine.If these chemicals are used, it may cause corrosion and damage to the machine.
•Please carry the product with the fan filter unit packaged in good condition. Be sure to keep it horizontal when carrying it. If you use a potable cart or other tool to transport it, please use a cart with a platform that exceeds the packaging width of the machine.
•After the machine is installed, at least 30cm of the space must be reserved above the machine to facilitate future maintenance of the machine.Without enough maintenance space, the body will not be able to be repaired or replaced.
•Before trial use, please remove the protective film attached to the suction port and under the equalizing plate.

6. Precautions for installation and use of fan filter unit:
1)When the fan filter unit is installed in a clean room, be sure to follow the instructions below when entering the clean room.
2)Please wear dust clothes to avoid carrying dust into the room.
3)Please use alcohol to clean the tools so as not to bring dust into the room.
4)Please use alcohol to clean the unprotected parts of the wardrobe to avoid bringing dust into the room.
5)Do not directly press the fan filter unit to avoid deformation of the machine.
6)Do not operate the machine with wet hands to avoid the risk of electric shock.
7)Do not cover the suction port and blowout port of the body. If they are covered, the performance of the machine will not work properly, resulting in abnormal function or damage to electrical components.

HEPA Filter Leakage Rate Test: Is it necessary for the leakage rate of HEPA filter to be less than or equal to 0.01%?

Daily Maintenance and Operation Management of Cleanroom